Within the framework of this work, the results of the study of ZnO and SiO2 samples by scanning electron microscopy at various scanning parameters are presented. It is established that the quality of the resulting image is affected by the speed of image scanning and the presence of an additional conductive coating. When studying ZnO nanoparticles, it is shown that with an increase in the image scanning speed from 1 to 7 microseconds / pixel, the number of aberrations decreases, which leads to a higher contrast of the ZnO particle boundaries. In the case of SiO2, with an increase in the scanning speed of the image, a decrease in the contrast of the boundaries is observed, which is associated with the accumulation of electron beam charges on the sample surface. It is shown that when a layer of gold is deposited on the surface of the sample, the sharpness of the resulting image increases. The deposition of a carbon layer led to the formation of a fuzzy image of the surface of the samples, which is characterized by a fuzzy separation of the particle boundaries of the studied samples.
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